OTHER
Micron Sized Arm Using Reversible TiNi Alloy Thin Film Actuators
K. Kuribayashi, Takao TANIGUCHI, Masaaki Yositake, S. Ogawa
- Year
- 1992
- Citations
- 15
Keywords
Materials scienceWaferActuatorAlloyRobotic armSiliconShape-memory alloyProcess (computing)Thin filmComposite material
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