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Automatic film formation system for ultra-thin organic/inorganic hetero-structure by mass-controlled layer-by-layer sequential adsorption method with ‘nm’ scale accuracy

Seimei Shiratori, Takahiro Ito, Takeshi Yamada

Year: 2002
Citations: 31

Keywords

Quartz crystal microbalanceAdsorptionLayer (electronics)Materials scienceLayer by layerThin filmTransmission electron microscopyPolymerFabricationPolyelectrolyte

Automatic film formation system for ultra-thin organic/inorganic hetero-structure by mass-controlled layer-by-layer sequential adsorption method with ‘nm’ scale accuracy

Keywords

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