OTHER
Additive Processes for Piezoelectric Materials: Piezoelectric MEMS
Ronald G. Polcawich, Jeffrey S. Pulskamp
- Year
- 2011
- Citations
- 34
Keywords
PiezoelectricityMaterials scienceMicroelectromechanical systemsLead zirconate titanateResonatorPMUTFabricationEnergy harvestingOptoelectronicsNanogenerator
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