OTHER
Robot Assisted Optical Emission Tomography in an Inductively Coupled Plasma Reactor
Akifumi Okigawa Nakano, Zoran Petrović, Takeki Kogawa Takeki Kogawa, Akihiko Itoh
- Year
- 1996
- Citations
- 38
Abstract
The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.
Keywords
Inductively coupled plasmaPlasmaExcitationInductively coupled plasma atomic emission spectroscopyVolumetric flow rateElectromagnetic coilDissipationChemistryMaterials scienceOptics
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