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Electronically integrated, mass-manufactured, microscopic robots

Marc Z. Miskin, Alejandro J. Cortese, Kyle Dorsey, Edward Esposito, Michael Reynolds, Qingkun Liu, Michael C. Cao, David A. Muller, Paul L. McEuen, Itai Cohen

Year
2020
Citations
344

Keywords

MicroelectronicsRobotWaferActuatorLithographyComputer scienceVoltageNanotechnologyElectrical engineeringSilicon

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