OTHER
Electronically integrated, mass-manufactured, microscopic robots
Marc Z. Miskin, Alejandro J. Cortese, Kyle Dorsey, Edward Esposito, Michael Reynolds, Qingkun Liu, Michael C. Cao, David A. Muller, Paul L. McEuen, Itai Cohen
- Year
- 2020
- Citations
- 344
Keywords
MicroelectronicsRobotWaferActuatorLithographyComputer scienceVoltageNanotechnologyElectrical engineeringSilicon
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