OTHER
A new compliant polishing method using 3D-printed elastic polishing tool with TPMS structure
Cheng Fan, Zhiyue Han, Congyu Zha, Wenbin Wang, Jianzhong Xu, Feng Zhao, Fusheng Liang, Zhao Wang
- 发表年份
- 2025
- 引用次数
- 1
关键词
PolishingMachiningSurface roughnessStiffnessFinite element methodChemical-mechanical planarizationSurface finish
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