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On-chip integration of vector force sensor based on AlGaInP micro-LEDs with interface light coupling modulated by microstructures

Jiansong Feng, Zhongqi Wang, Mengyuan Zhanghu, Xu Zhang, Yong Shen, Jing Yang, Zhibin Li, Bin Chen, Taihong Wang, Xiaolong Chen, Zhaojun Liu

发表年份
2024
引用次数
1

关键词

Light-emitting diodeOptoelectronicsCoupling (piping)ChipInterface (matter)Materials scienceOptical couplingOpticsOptical fiberElectrical engineering

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