A Plotter-Based Automatic Measurement and Statistical Characterization of Multiple Discrete Power Devices

摘要

We propose an automatic measurement system for efficiently characterizing multiple packaged power devices. The proposed system sequentially measures arranged power devices using a robot arm on an XY plotter. The proposed measurement system facilitates the characterization of multiple power devices, eliminating possible human errors. Through experiments using 144 SiC power MOSFETs, we demonstrate that our measurement system achieves comparable accuracy and precision to the conventional measurement results using a commercial curve tracer. We also present statistical characterization of the measurement data of 30 MOSFETs using surface potential based SPICE model.