Development of MEMS Sensor and Intelligent Sensor

摘要

MEMS sensor and intelligent sensor are the representation of new sensor,they have the characteristics of integration and intelligentize.Introduced stop-press development complexion of sensors, including measurement precision,delicacy,volume,translation mechanism,amalgamation theory,etc.Enumerated application example,such as bionics robot,minimize secondary planet,computer vision system,etc.Analyzed the development trend of the sensor,such as precision,security,micromation,minuteness power wasting,intelligent,numeric,etc.