OTHER
Nanostructures in Motion: Micro-Instruments for Moving Nanometer-Scale Objects
Noel C. MacDonald
- 发表年份
- 1999
- 引用次数
- 2
关键词
Microelectromechanical systemsActuatorNanometreMachiningAccelerometerSurface micromachiningMechanical engineeringEngineeringFluidicsRanging
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