OTHER
A 100 mA class ion implanter for large scale production of buried oxide SOI wafers
S. Moffatt
- 发表年份
- 1987
- 引用次数
- 3
关键词
WaferIon implantationMaterials scienceSilicon on insulatorSubstrate (aquarium)ThroughputIon beamOptoelectronicsBeam (structure)Computer science
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