Integrating Reliability into Microelectronics Manufacturing

摘要

Microelectronics Industry and Manufacturing Dual Use Microelectronics: A Reliability Approach Manufacturing of Microcircuits Crystal Growth and Substrate Damage Mechanism Dielectrics in the Manufacture of Microcircuits Reliable Active Layer Doping by Diffusion and Ion Implantation Lithography and Failure Mechanisms Metallizations for Devices and Circuits Device Packaging and Characterization Manufacturing of Plastic Integrated Circuits Manufacturing of Micromechanical Systems and Computer Control of Micromachining Manufacturing of Electronic Packages by Industrial Robots Manufacture of Microwave Monolithic Integrated Circuits.