<title>Three-dimensional fibre-optic position sensor</title>

摘要

An integrated approach to precision 3-D position measurement using an array of optical fibers is described. The mathematical model based on the calculation of 3-D light intensity distribution has been developed to analyze the performance of the sensor. The theoretical analyses have shown the existence of a unique solution in the presence of a certain defined noise level. The experimental results have confirmed the theoretical analysis and have indicated that a lateral resolution of 0.1 micrometers and a depth resolution of 1 micrometers is achievable. The sensor will find applications in 3-D position sensing on coordinate measuring machines, machine tools, robots, and other related areas.