A thin-film strain gauge tactile sensor array for robots

摘要

A novel 3-D tactile sensor array employing thin-film strain gauge deposited on an aluminum alloy substrate is described. The construction details of the tactile sensor array are given. The process of depositing the insulating layers, sensing film, the protective overlayer and other related aspects are presented. This kind of sensor using microfabrication technology has a very promising prospect for tactile sensing of robots.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>