Miniature robots for a desktop flexible micro manufacturing system

摘要

This article describes the basic structure and performance of miniature robots which incorporate micro-tools and microprobes to produce micro-devices such as LSI materials. In the experiment, typical results at the microscopic level, such as fine grating and micro indenting, are demonstrated. It is suggested that a strategy of combining aspects in a centralized and distributed manner might be useful to increase both productivity and flexibility in manufacturing. The architecture, based on a production process including capability recognition, initial planning, grouping, and dispatching to the working area, is described to control multiple miniature robots under graphical simulation for the desktop precise flexible micro manufacturing system.