DEVELOPMENT OF A PRECISION PARALLEL MICRO-MECHANISM FOR NANO TELE-OPERATION

摘要

There is an urgent need for nano-level teleoperation systems to carry out three-dimensional high-speed micromanipulations for medical and biotechnological applications. The authors have designed a precision parallel micro-mechanism driven by piezo actuators (PZT) for use as an operating robot with six degrees of freedom, maximum movement of 18 to 28 μm, and a resolution of 8 to 25 nm. Here, they present the conceptual design, synthesis, and control strategy along with an evaluation of the precision parallel micro-mechanism of this system. The experimental results indicate that the developed parallel micro-mechanism can be used to manipulate micro-objects at high speed and with a high degree of precision.