Miniature non-mechanical zoom camera using deformable MOEMS mirrors

摘要

We present a miniature non-mechanical zoom camera using deformable MOEMS mirrors. Bridger Photonics, Inc. (Bridger) in collaboration with Montana State University (MSU), has developed electrostatically actuated deformable MEMS mirrors for use in compact focus control and zoom imaging systems. Applications including microscopy, endomicroscopy, robotic surgery and cell-phone cameras. In comparison to conventional systems, our MEMS-based designs require no mechanically moving parts. Both circular and elliptical membranes are now being manufactured at the wafer level and possess excellent optical surface quality (membrane flatness < λ/4). The mirror diameters range from 1 - 4 mm. For membranes with a 25 μm air gap, the membrane stroke is 10 μm. In terms of the optical design, the mirrors are considered variable power optical elements. A device with 2 mm diameter and 10 μm stroke can vary its optical power over 40 diopters or 0.04mm^∧(-1). Equivalently, this corresponds to a focal length ranging from infinity to 25 mm. We have designed and demonstrated a zoom system using two MOEMS elements and exclusively commercial off-the-shelf optical components to achieve an optical zoom of 1.9x with a 15° full field of view. The total optical track length of the system is 36 mm. The design is approximately 30 mm x 30 mm x 20 mm including the optomechanical housing and image sensor. With custom optics, we anticipate achieving form factors that are compatible with incorporation into cell phones.