Multifunctional Ultraviolet Laser Induced Graphene for Flexible Artificial Sensory Neuron

摘要

Abstract Neuromorphic perceptual system (NPS) is inspired by the interaction between organisms and environment, which has boosted many emerging fields like human–machine interfaces and bionic robots. Laser‐induced graphene (LIG) can be a fast, low cost, and accurate patterning technology toward a flexible and biological plausible NPS. While, to unleash the full potential of LIG, thorny issues like low endurance and limited stretchability should be addressed. Herein, high‐performance ultraviolet LIG (UV‐LIG) based sensors and electrodes are introduced for building flexible artificial sensory neuron (ASN). The UV‐LIG can be fabricated with a fine linewidth of ≈75 µm and a high conductivity of 3900 ± 150 S cm −1 , which facilitates the demonstration of LIG toolbox, containing bending sensors, flexible heaters, etc. The transferred LIG electrodes retain good conducting property (only ≈12.7% increment in resistance) and enable large stretchability (up to 150% strain), outperforming most of the LIG‐based strain sensors. As a proof‐of‐concept, an artificial sensory neuron that is able to mimic the strain perception of somatosensory system is realized based on the integration of LIG‐based functional components and an InGaZnO (Indium‐Gallium‐Zinc Oxide, IGZO)‐based synaptic transistor. This work can provide an efficient patterning methodology as well as essential components for neuromorphic perceptual systems.