Computer Simulation of Airflow and Particle Transport in Cleanrooms

摘要

Numerical procedures are well developed for simulating simple fluid flows and associated heat and mass transfer processes. Steady isothermal airflow in either a vertical laminar flow cleanroom or a tunnel cleanroom can be predicted accurately by using currently available simulation codes. The effects of items such as shields, process equipment, robot components, and bench design on the cleanroom airflow can be investigated by performing simulation experiments on a computer rather than physical experiments on a mockup. Design and operating parameters can be readily varied in the simulation to demonstrate their influence on the cleanroom performance. A review of existing airflow and particle transport simulation methods is presented and some recent applications to cleanroom airflow prediction are described. Advantages of computer simulation over experimental measurements and limitations are discussed, and future directions of cleanroom modeling are presented.