OTHER
Combinatorial synthesis of thin film libraries for microwave dielectrics
B. Wessler, V. Jéhanno, W. Rossner, Wilhelm F. Maier
- 发表年份
- 2003
- 引用次数
- 21
关键词
Materials scienceCalcinationDielectricMicrowaveWaferThin filmDopantSinteringAnnealing (glass)Sol-gel
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