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Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing

Seongjin Yim, Doo Yong Lee

发表年份
1999
引用次数
27

关键词

Gantt chartJob shop schedulingScheduling (production processes)Wafer fabricationComputer scienceSimulated annealingScheduleSemiconductor device fabricationMathematical optimizationReal-time computing

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