Microchannel‐Confined MXene Based Flexible Piezoresistive Multifunctional Micro‐Force Sensor

摘要

Abstract Multifunctional micro‐force sensing in one device is an urgent need for the higher integration of the smaller flexible electronic device toward wearable health‐monitoring equipment, intelligent robotics, and efficient human–machine interface. Herein, a novel microchannel‐confined MXene‐based flexible piezoresistive sensor is demonstrated to simultaneously achieve multi‐types micro‐force sensing of pressure, sound, and acceleration. Benefiting from the synergistically confined effect of the fingerprint‐microstructured channel and the accordion‐microstructured MXene materials, the as‐designed sensor remarkably endows a low detection limit of 9 Pa, a high sensitivity of 99.5 kPa −1 , and a fast response time of 4 ms, as well as non‐attenuating durability over 10 000 cycles. Moreover, the fabricated sensor is multifunctionally capable of sensing sounds, micromotion, and acceleration in one device. Evidently, such a multifunctional sensing characteristic can highlight the bright prospect of the microchannel‐confined MXene‐based micro‐force sensor for the higher integration of flexible electronics.