ConamArray: A 32-Element Broadband MEMS Ultrasound Transducer Array

摘要

This paper presents the ConamArray, a compact broadband ultrasound transducer array composed of 32 MEMS loudspeakers. Unlike conventional broadband transducers, which are typically large and require high driving voltages, the proposed array combines small form factor MEMS devices in a staggered two-row configuration to enable beam steering across a wide ultrasonic band. A dual-microcontroller back-end with synchronized multi-DAC outputs provides flexible waveform generation and runtime steering control. Both simulations and anechoic chamber measurements demonstrate that the ConamArray achieves stable beam steering, while also revealing the onset of grating lobes when steering to larger angles. These results confirm the feasibility of broadband beam steering using MEMS technology, opening new opportunities for applications in ultrasonic imaging, localization, and bio-inspired robotics.